Process for fabricating supersphere solid immersion lens

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DC Field	Value	Language
dc.contributor.author	Hsu	en_US
dc.contributor.author	Wensyang	en_US
dc.contributor.author	Sun	en_US
dc.contributor.author	Yi-Ting	en_US
dc.date.accessioned	2014-12-16T06:14:33Z	-
dc.date.available	2014-12-16T06:14:33Z	-
dc.date.issued	2006-08-01	en_US
dc.identifier.govdoc	G03F001/00	zh_TW
dc.identifier.govdoc	G03F007/00	zh_TW
dc.identifier.govdoc	G03C005/00	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/104805	-
dc.description.abstract	The present invention relates to process for fabricating supersphere solid immersion lens (SSIL). The procedure of the present invention comprises the steps of: firstly, coating a positive photoresist layer on a substrate, followed by first exposure and second exposure with different exposure dose separately by first mask and second mask to form the positive photoresist structure with different dimensions and depths. The first exposure dose is supplied enough to make sure the patterns of the first mask can be observed on the positive photoresist layer during the alignment of the second exposure process. And the following reflow process forms a supersphere solid immersion lens (SSIL) structure.	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	Process for fabricating supersphere solid immersion lens	zh_TW
dc.type	Patents	en_US
dc.citation.patentcountry	USA	zh_TW
dc.citation.patentnumber	07083902	zh_TW
Appears in Collections:	Patents

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