標題: | BIOCHEMICAL SENSOR AND METHOD OF MANUFACTURING THE SAME |
作者: | ZAN Hsiao-Wen Tsai Chuang-Chuang Meng Hsin-Fei Yeh Chun-Cheng Dai Ming-Zhi Li Chang-Hung |
公開日期: | 6-Sep-2012 |
摘要: | A biochemical sensor and a method of manufacturing the same are disclosed. The biochemical sensor includes a substrate, a gate arranged on one side of the substrate, a gate insulating layer arranged on one side of the gate opposite to the substrate, an active layer arranged on one side of the gate insulating layer opposite to the gate, a source and a drain arranged on one side of the active layer opposite to the gate insulating layer, and a biochemical sensing layer arranged on one side of the active layer opposite to the gate insulating layer and between the source and the drain. |
官方說明文件#: | H01L029/66 H01L021/02 |
URI: | http://hdl.handle.net/11536/105137 |
專利國: | USA |
專利號碼: | 20120223370 |
Appears in Collections: | Patents |
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