標題: BIOCHEMICAL SENSOR AND METHOD OF MANUFACTURING THE SAME
作者: ZAN Hsiao-Wen
Tsai Chuang-Chuang
Meng Hsin-Fei
Yeh Chun-Cheng
Dai Ming-Zhi
Li Chang-Hung
公開日期: 6-Sep-2012
摘要: A biochemical sensor and a method of manufacturing the same are disclosed. The biochemical sensor includes a substrate, a gate arranged on one side of the substrate, a gate insulating layer arranged on one side of the gate opposite to the substrate, an active layer arranged on one side of the gate insulating layer opposite to the gate, a source and a drain arranged on one side of the active layer opposite to the gate insulating layer, and a biochemical sensing layer arranged on one side of the active layer opposite to the gate insulating layer and between the source and the drain.
官方說明文件#: H01L029/66
H01L021/02
URI: http://hdl.handle.net/11536/105137
專利國: USA
專利號碼: 20120223370
Appears in Collections:Patents


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