標題: Micromachined polarization beam splitter with adjustable leak ratio for optical pickup
作者: Tien, C. H.
Hung, C. H.
光電工程學系
顯示科技研究所
Department of Photonics
Institute of Display
關鍵字: integrated optics;microelectromechanical systems (MEMS);optical components;optical device fabrication
公開日期: 1-Jul-2007
摘要: In this letter, we propose the optomechanical design and fabrication of a novel batched-processed polarization beam splitter (PBS) with an adjustable leak ratio for optical recording applications. The micro-PBS was fabricated by a 410-nm low stress silicon nitride Si3N4 membrane integrated with a bimorph actuator. A de drive voltage was applied to allow an adjustable leak ratio (0-0.24) with incident angle from 65 degrees to 75 degrees for operation in the different optical requirements (phase-change and magneto-optical disks) at lambda = 633 nm. The characteristics of the fabricated PBS are in close agreement with the theoretical calculations and confirm its feasibility.
URI: http://dx.doi.org/10.1109/LPT.2007.900080
http://hdl.handle.net/11536/10638
ISSN: 1041-1135
DOI: 10.1109/LPT.2007.900080
期刊: IEEE PHOTONICS TECHNOLOGY LETTERS
Volume: 19
Issue: 13-16
起始頁: 1109
結束頁: 1111
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