標題: | High-speed GaAs metal gate semiconductor field effect transistor structure grown on a composite Ge/Ge(x)Si(1-x)/Si substrate |
作者: | Luo, Guang-Li Hsieh, Yen-Chang Chang, Edward Yi Pilkuhn, M. H. Chien, Chao-Hsin Yang, Tsung-Hsi Cheng, Chao-Ching Chang, Chun-Yen 材料科學與工程學系 電子工程學系及電子研究所 Department of Materials Science and Engineering Department of Electronics Engineering and Institute of Electronics |
公開日期: | 15-四月-2007 |
摘要: | In this study we used a low-pressure metal organic vapor phase epitaxy method to investigate the growth of GaAs metal gate semiconductor field effect transistor (MESFET) structures on a Si substrate. The buffer layer between the Si substrate and the grown GaAs epitaxial layers was a composite Ge/Si(0.05)Ge(0.95)/Si(0.1)Ge(0.9) metamorphic layer. We used transmission electron microscopy to observe the microstructures formed in the grown GaAs/Ge/Si(x)Ge(1-x)/Si material and atomic force microscopy to analyze the surface morphology and the formation of antiphase domains in the GaAs epitaxial layers. The measured Hall electron mobility in the channel layer of a MESFET structure grown on a 6 degrees misoriented Si substrate was 2015 cm(2) V(-1) s(-1) with a carrier concentration of 5.0x10(17) cm(-3). The MESFET device fabricated on this sample exhibited good current-voltage characteristics. |
URI: | http://dx.doi.org/10.1063/1.2722245 http://hdl.handle.net/11536/10912 |
ISSN: | 0021-8979 |
DOI: | 10.1063/1.2722245 |
期刊: | JOURNAL OF APPLIED PHYSICS |
Volume: | 101 |
Issue: | 8 |
結束頁: | |
顯示於類別: | 期刊論文 |