High-temperature leakage improvement in metal-insulator-metal capacitors by work-function tuning

標題:	High-temperature leakage improvement in metal-insulator-metal capacitors by work-function tuning
作者:	Chiang, K. C. Cheng, C. H. Pan, H. C. Hsiao, N. Chou, C. P. Chin, Albert Hwang, H. L. 機械工程學系電子工程學系及電子研究所 Department of Mechanical Engineering Department of Electronics Engineering and Institute of Electronics
關鍵字:	capacitor;high temperature;metal-insulator-metal (MIM);Ni;thermal leakage
公開日期:	1-三月-2007
摘要:	Using low-cost and high work-function Ni, a low leakage current of 5 x 10(-6) A/cm(2) at 125 degrees C is obtained in a high 25-fF/mu m(2)-density SrTiO3 metal-insulator-metal (MIM) capacitor processed at 400 degrees C. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall k value beyond previous laminate structure.
URI:	http://dx.doi.org/10.1109/LED.2007.891265 http://hdl.handle.net/11536/11074
ISSN:	0741-3106
DOI:	10.1109/LED.2007.891265
期刊:	IEEE ELECTRON DEVICE LETTERS
Volume:	28
Issue:	3
起始頁:	235
結束頁:	237
顯示於類別：	期刊論文

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