標題: Analysis of the through-focus images with boundary-element method in high resolution optical metrology
作者: Shyu, Deh-Ming
Lu, Mao-Hong
光電工程學系
Department of Photonics
公開日期: 1-Oct-2006
摘要: For through-focus focus metric we build a measurement system, in which a single diffraction-limited micro lens is used for imaging and a grating with a few pitches is used as a target. In this system, the optical field is calculated by the boundary-element method, in which a new algorithm is developed to reduce the dimension of a matrix. As a result, the memory capacity required in this calculation is much reduced up to 83% in our simulation case. An optimization of the grating structure is made to obtain the highest sensitivity for the critical dimension metrology. With the optimized grating structure the simulation shows a sensitivity of less than 1 nm in the through-focus focus metric. (c) 2006 American Institute of Physics.
URI: http://dx.doi.org/10.1063/1.2354570
http://hdl.handle.net/11536/11692
ISSN: 0034-6748
DOI: 10.1063/1.2354570
期刊: REVIEW OF SCIENTIFIC INSTRUMENTS
Volume: 77
Issue: 10
結束頁: 
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