薄膜塗佈方法

Abstract

一種薄膜塗佈方法，包括提供基板、提供雙刮刀狹縫塗佈裝置設置於基板上，藉由雙刮刀狹縫塗佈裝置將塗料均勻的塗佈於基板以形成薄膜，其中雙刮刀狹縫塗佈裝置係具有第一刮刀、第二刮刀及進料管，其中進料管之進料噴嘴係設置在第一刮刀與第二刮刀之間的狹縫中，第一刮刀及第二刮刀係沿著基板之垂直方向平行設置於基板上，當雙刮刀狹縫塗佈裝置係沿著基板之垂直方向移動時，塗料係藉由多個進料噴嘴進入狹縫之後，進行一邊移動雙刮刀狹縫塗佈裝置一邊進行塗料的下料程序，當塗料經由雙刮刀狹縫塗佈裝置塗佈於基板上時，塗料會經由第一刮刀對塗料進行第一次平坦化步驟，接著係利用第二刮刀進行第二次平坦化步驟，將塗料均勻的塗佈於基板上。最後，重覆塗佈塗料於基板上之步驟，直到塗料塗佈於基板以形成具有一定且均勻厚度之薄膜。 A thin film coating method includes a substrate, and a double blade slit coating apparatus is placed on the substrate, such that the coating material is coated on the substrate to form a thin film. The double blade slit coating apparatus equipped with a first blade, a second blade, and a feed tube, in which the nozzle of the feed tube is disposed between the first blade and the second blade, and the first blade and the second blade are disposed along the vertical direction of the substrate and are paralleled to the substrate. When the double blade slit coating apparatus is moved forward along the substrate in a vertical direction, the coating material is feed through the nozzle into the slit at the same time. When the coating material is coated on the substrate, the coating material is performed with a first flat process by the first blade and then is performed with a second flat process to the coating material by the second blade, such that the coating material is formed flat on the substrate. Finally, the coating material is repeated to form on the substrate until the coating material is coated on the substrate to form a thin film with a uniform thickness.