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dc.contributor.authorWu, WHen_US
dc.contributor.authorTsui, BYen_US
dc.contributor.authorHuang, YPen_US
dc.contributor.authorHsieh, FCen_US
dc.contributor.authorChen, MCen_US
dc.contributor.authorHou, YTen_US
dc.contributor.authorJin, Yen_US
dc.contributor.authorTao, HJen_US
dc.contributor.authorChen, SCen_US
dc.contributor.authorLiang, MSen_US
dc.date.accessioned2014-12-08T15:16:41Z-
dc.date.available2014-12-08T15:16:41Z-
dc.date.issued2006-05-01en_US
dc.identifier.issn0741-3106en_US
dc.identifier.urihttp://dx.doi.org/10.1109/LED.2006.873423en_US
dc.identifier.urihttp://hdl.handle.net/11536/12306-
dc.description.abstractA new circuit model of -five elements has been proposed for the two-frequency capacitance-voltage (C-V) correction of high-k gate dielectric and ultrathin oxide. This five-element circuit model considered the static and dynamic dielectric losses in a lossy MOS capacitor, the parasitic well/substrate resistance, and the series inductance in the cables and probing system. Each of the circuit elements could be easily extracted from the two-frequency C-V and static current-voltage (I-V) measurements if some criteria are well satisfied. In addition, this model can also be transformed into another two four-element circuit models to simplify the analysis and calculations, depending on the gate ea age current.en_US
dc.language.isoen_USen_US
dc.subjecthigh-k dielectricen_US
dc.subjectMOS capacitoren_US
dc.subjecttwo-frequency capacitance-voltage (C-V) correctionen_US
dc.subjectultrathin oxideen_US
dc.titleTwo-frequency C-V correction using five-element circuit model for high-k gate dielectric and ultrathin oxideen_US
dc.typeArticleen_US
dc.identifier.doi10.1109/LED.2006.873423en_US
dc.identifier.journalIEEE ELECTRON DEVICE LETTERSen_US
dc.citation.volume27en_US
dc.citation.issue5en_US
dc.citation.spage399en_US
dc.citation.epage401en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:000237602300029-
dc.citation.woscount13-
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