標題: | Low threshold voltage CMOSFETs with NiSi fully silicided gate and Modified Schottky barrier source/drain junction |
作者: | Lin, Chia-Pin Tsui, Bing-Yue Hsieh, Chih-Ming Huang, Chih-Feng 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 2007 |
摘要: | Low threshold voltage CMOSFETs with NiSi fully silicided gate and Modified Schottky barrier source/drain junction were fabricated. Symmetric threshold voltage was obtained by implant-to-silicide technique. Lateral growth rate and thermal stability of NiSi on SiO2 were investigated. Single silicide and low temperature process make the proposed process very promising in sub-45nm technology nodes. |
URI: | http://hdl.handle.net/11536/12357 |
ISBN: | 978-1-4244-0584-8 |
期刊: | 2007 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA), Proceedings of Technical Papers |
起始頁: | 172 |
結束頁: | 173 |
Appears in Collections: | Conferences Paper |