標題: Film Profile Engineering (FPE): A New Concept for Manufacturing of Short-Channel Metal Oxide TFTs
作者: Lyu, Rong-Jhe
Lin, Horng-Chih
Wu, Ming-Hung
Shie, Bo-Shiuan
Hung, Hsiang-Ting
Huang, Tiao-Yuan
電機工程學系
Department of Electrical and Computer Engineering
公開日期: 1-Jan-2013
摘要: A film profile engineering (FPE) concept which utilizes the unique features of various deposition tools to tailor and optimize the profile of the deposited films was demonstrated with the fabricated ZnO TFTs. By implementing the PR trimming technique, high performance devices with L < 100 nm can be readily achieved.
URI: http://hdl.handle.net/11536/124958
ISBN: 978-1-4799-2306-9
ISSN: 
期刊: 2013 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM)
Appears in Collections:Conferences Paper