完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Yeh, KT | en_US |
dc.contributor.author | Lin, CH | en_US |
dc.contributor.author | Hu, JR | en_US |
dc.contributor.author | Loong, WA | en_US |
dc.date.accessioned | 2014-12-08T15:17:19Z | - |
dc.date.available | 2014-12-08T15:17:19Z | - |
dc.date.issued | 2006-03-01 | en_US |
dc.identifier.issn | 0021-4922 | en_US |
dc.identifier.uri | http://dx.doi.org/10.1143/JJAP.45.1566 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/12592 | - |
dc.description.abstract | Because the surface roughness of a thin film will cause light scattering, the reflectance (R) and transmittance (T) measured using a UV/visible (vis) spectrometer become lower than the actual values. The deviation becomes larger with increasing roughness and decreasing wavelength of incident light. Hence, it is necessary to correct measured R and T using roughness as a modification factor. The refraction (n) and extinction coefficient (k) obtained by the modified R-T method are closer to those results obtained using a variable angle spectroscopic ellipsometer (VASE), which provides more precise results than a n and k analyzer. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | refraction | en_US |
dc.subject | extinction coefficient | en_US |
dc.subject | modified R-T method | en_US |
dc.subject | VASE | en_US |
dc.subject | n and k analyzer | en_US |
dc.title | Modified reflectance-transmittance method for the metrology of thin film optical properties | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1143/JJAP.45.1566 | en_US |
dc.identifier.journal | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | en_US |
dc.citation.volume | 45 | en_US |
dc.citation.issue | 3A | en_US |
dc.citation.spage | 1566 | en_US |
dc.citation.epage | 1569 | en_US |
dc.contributor.department | 應用化學系 | zh_TW |
dc.contributor.department | Department of Applied Chemistry | en_US |
dc.identifier.wosnumber | WOS:000236191900018 | - |
dc.citation.woscount | 0 | - |
顯示於類別: | 期刊論文 |