标题: | 預測干擾觀測器應用於半導體製程的隨機干擾 Predictive Disturbance Observer Structure Applied to Stochastic Disturbances of Semiconductor Process |
作者: | 蔡德修 Tsai, Te-Hsiu 李安謙 Lee, An-Chen 機械工程系所 |
关键字: | 批次控制;隨機干擾;最小變異控制;干擾觀測器;Run-to-Run control;Stochastic Disturbance;Minimum Variance control;Disturbance Observer |
公开日期: | 2015 |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#GT070251086 http://hdl.handle.net/11536/126703 |
显示于类别: | Thesis |