醯胺類官能基提升多晶矽奈米線場效電晶體對氨氣感測之靈敏度

Abstract

本研究為探討多晶矽奈米線場效電晶體對低濃度氨氣之感測能力，當多晶矽奈米線場效電晶體欲進行低濃度氨氣感測時，其感測能力有限。為了提升元件對低濃度氨氣之感測能力，本實驗將含有醯胺類官能基寡聚物的有機材料修飾於多晶矽奈米線表面上。藉由醯胺類結構中所具有的化學吸引力增強氨氣分子與多晶矽奈米線表面的吸附，進而提升多晶矽奈米線場效電晶體對低濃度氨氣的感測能力。另外，為了瞭解環境因素對低濃度氨氣感測能力所造成之影響，本實驗進一步地將多晶矽奈米線場效電晶體置於不同相對濕度下做測試，確認氨氣分子與水分子之間的競爭關係。最後，實驗結果亦證實若修飾含有特定官能基之多晶矽奈米線場效電晶體，其對低濃度氨氣具有高靈敏度的感測能力，因此非常適用於生醫中肝病病患的氨氣檢測。

In this thesis, the ammonia gas sensing of poly-Si nanowires field effect transistors (p-Si NWs FETs) was discussed. The ammonia gas sensing ability of p-Si NWs FETs is limited at low-concentration. Therefore, the NWs surface was further modified by amide group containing materials to enhance the low-concentration ammonia gas sensing ability. The amide-based compound has chemical adsorption which can help ammonia gas molecular to absorb on the NWs surface and that can improve the low-concentration ammonia gas sensing ability. Besides, in order to understand the effect of environment factor, we also tested the sensing ability under different relative humidity. Finally, the experiment results showed that the high sensitivity property of modified p-Si NWs FETs are able to be applied for biomedical detection in the liver disease.