Title: 準分子雷射結晶及反向摻雜應用於低溫p型多晶鍺薄膜電晶體之研究
Study on the Characteristics of Low-Temperature p-Channel Polycrystalline-Germanium Thin-Film Transistors with the Excimer Laser Crystallization and Counter Doping
Authors: 黃敬餘
Huang, Ching-Yu
鄭晃忠
Cheng, Huang-Chung
電子工程學系 電子研究所
Keywords: 鍺;薄膜電晶體;準分子雷射結晶;反向摻雜;Germanium;Thin-Film Transistors;Excimer Laser Crystallization;Counter Doping
Issue Date: 2015
URI: http://140.113.39.130/cdrfb3/record/nctu/#GT070250140
http://hdl.handle.net/11536/127064
Appears in Collections:Thesis