準分子雷射結晶及反向摻雜應用於低溫p型多晶鍺薄膜電晶體之研究

標題:	準分子雷射結晶及反向摻雜應用於低溫p型多晶鍺薄膜電晶體之研究 Study on the Characteristics of Low-Temperature p-Channel Polycrystalline-Germanium Thin-Film Transistors with the Excimer Laser Crystallization and Counter Doping
作者:	黃敬餘 Huang, Ching-Yu 鄭晃忠 Cheng, Huang-Chung 電子工程學系電子研究所
關鍵字:	鍺;薄膜電晶體;準分子雷射結晶;反向摻雜;Germanium;Thin-Film Transistors;Excimer Laser Crystallization;Counter Doping
公開日期:	2015
URI:	http://140.113.39.130/cdrfb3/record/nctu/#GT070250140 http://hdl.handle.net/11536/127064
Appears in Collections:	Thesis