標題: | Low Temperature a-SiGe:H Near-IR Sensor and Photovoltaic Devices for Flexible Multi-functional Panel |
作者: | Kao, Ming-Hsuan Shieh, Jia-Min Shen, Chang-Hong Yu, Peichen Kuo, Hao-Chung Lee, Ching-Ting Yang, Fu-Liang 光電工程學系 Department of Photonics |
公開日期: | 1-Jan-2013 |
摘要: | High Near-IR response photo-diode (0.1A/W@800nm) and high efficiency a-Si/a-SiGe tandem solar cell (8.38%) were demonstrated using high-density plasma-fabricated a-SiGe:H deposition technology with Si2H6 and GeH4 precursor. The low temperature (140 degrees C) a-SiGe: H films with low defect density (2.3x10(16)cm(-3)) are suitable for the applications of flexible solar self-powered multi-functional panel and 3D stacked monolithic devices. |
URI: | http://hdl.handle.net/11536/128500 |
ISBN: | 978-1-55752-973-2 |
ISSN: | 2160-9020 |
期刊: | 2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) |
Appears in Collections: | Conferences Paper |