標題: A Study of Mechanical Lift-Off Technology for High-Efficiency Vertical LEDs Using Micro-Porous GaN Template
作者: Lee, Chia-Yu
Lin, Da-Wei
Liu, Che-Yu
Hsu, Shih-Chieh
Kuo, Hao-Chung
Wang, Shing-Chung
Chang, Chun-Yen
電子工程學系及電子研究所
光電工程學系
Department of Electronics Engineering and Institute of Electronics
Department of Photonics
公開日期: 1-Jan-2013
摘要: The high efficiency vertical light emitting diodes (V-LEDs) using mechanical lift-off with Micro-Porous GaN template formed by high temperature molten KOH wet etching process were demonstrated. The average threading dislocation density (TDD) of u-GaN after regrowth was estimated by transmission electron microscopy (TEM) reduced from 2x10(9) to 1x10(8) cm(2). The sapphire substrate was easily removed by mechanical lift-off during wafer bonding process. The light output of V-LEDs are greatly enhanced by 100% compared with Conventional-LEDs at an operating current of 20mA due to the high quality thin GaN and excellent heating dissipation.
URI: http://hdl.handle.net/11536/128502
ISBN: 978-1-55752-973-2
ISSN: 2160-9020
期刊: 2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)
Appears in Collections:Conferences Paper