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dc.contributor.authorCHANG Yien_US
dc.contributor.authorKUO Chien-Ien_US
dc.contributor.authorHSU Heng-Tungen_US
dc.date.accessioned2015-12-04T07:03:12Z-
dc.date.available2015-12-04T07:03:12Z-
dc.date.issued2015-08-20en_US
dc.identifier.govdocH01L029/423zh_TW
dc.identifier.govdocH01L021/285zh_TW
dc.identifier.govdocH01L029/778zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/128683-
dc.description.abstractThe present invention discloses a gate structure, which is applied for an electronic component comprising a substrate and an active region defined thereon, and such the gate structure is disposed in the active region and is a T-shaped gate having a stem with a height of 250 nm. Preferably, the gate structure has a gate length of 60 nm.zh_TW
dc.language.isozh_TWen_US
dc.titleGATE STRUCTUREzh_TW
dc.typePatentsen_US
dc.citation.patentcountryUSAzh_TW
dc.citation.patentnumber20150236109zh_TW
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