標題: | Stress measurement of thin film on flexible substrate by using projection moire method and heterodyne interferometry |
作者: | Chen, Kun-Huang Chen, Jing-Heng Tseng, Hua-Ken Chang, Wei-Yao 光電工程學系 光電工程研究所 Department of Photonics Institute of EO Enginerring |
關鍵字: | flexible substrate;thin-film stress measurement;projection moire;Talbot effect;heterodyne interferometry |
公開日期: | 1-六月-2016 |
摘要: | We propose a stress measurement system based on a projection moire method and heterodyne interferometry for thin films on a flexible substrate. In the measurement setup, a CMOS camera in which every pixel can receive a series of heterodyne moire signals by using a continuously relative displacement with a constant velocity is used. Furthermore, the phase of the optimized sinusoidal curve and the surface profile of the flexible substrate are determined using a least-squares sine fitting algorithm. The thin-film stress is obtained by representing the cross-sectional curve of the surface profile by using a polynomial fitting method, estimating the resultant curvature radii of the uncoated and coated substrates, and using these two radii in the corrected Stoney formula. The proposed measurement system has the advantages of high accuracy, high resolution, and high capacity for substrates with high flexibility and a large measurement depth. (C) The Authors. |
URI: | http://dx.doi.org/10.1117/1.OE.55.6.064102 http://hdl.handle.net/11536/132580 |
ISSN: | 0091-3286 |
DOI: | 10.1117/1.OE.55.6.064102 |
期刊: | OPTICAL ENGINEERING |
Volume: | 55 |
Issue: | 6 |
起始頁: | 0 |
結束頁: | 0 |
顯示於類別: | 期刊論文 |