標題: Stress measurement of thin film on flexible substrate by using projection moire method and heterodyne interferometry
作者: Chen, Kun-Huang
Chen, Jing-Heng
Tseng, Hua-Ken
Chang, Wei-Yao
光電工程學系
光電工程研究所
Department of Photonics
Institute of EO Enginerring
關鍵字: flexible substrate;thin-film stress measurement;projection moire;Talbot effect;heterodyne interferometry
公開日期: 1-Jun-2016
摘要: We propose a stress measurement system based on a projection moire method and heterodyne interferometry for thin films on a flexible substrate. In the measurement setup, a CMOS camera in which every pixel can receive a series of heterodyne moire signals by using a continuously relative displacement with a constant velocity is used. Furthermore, the phase of the optimized sinusoidal curve and the surface profile of the flexible substrate are determined using a least-squares sine fitting algorithm. The thin-film stress is obtained by representing the cross-sectional curve of the surface profile by using a polynomial fitting method, estimating the resultant curvature radii of the uncoated and coated substrates, and using these two radii in the corrected Stoney formula. The proposed measurement system has the advantages of high accuracy, high resolution, and high capacity for substrates with high flexibility and a large measurement depth. (C) The Authors.
URI: http://dx.doi.org/10.1117/1.OE.55.6.064102
http://hdl.handle.net/11536/132580
ISSN: 0091-3286
DOI: 10.1117/1.OE.55.6.064102
期刊: OPTICAL ENGINEERING
Volume: 55
Issue: 6
起始頁: 0
結束頁: 0
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