標題: Low-Temperature and Ultrafast Synthesis of Patternable Few-Layer Transition Metal Dichacogenides with Controllable Stacking Alignment by a Microwave-Assisted Selenization Process
作者: Chen, Yu-Ze
Medina, Henry
Wang, Sheng-Wen
Su, Teng-Yu
Li, Jian-Guang
Yen, Wen-Chun
Cheng, Kai-Yuan
Kuo, Hao-Chung
Shen, Guozhen
Chueh, Yu-Lun
光電工程學系
Department of Photonics
公開日期: 23-二月-2016
摘要: To date, the chemical vapor deposition (CVD) process is the most popular approach because of its high yield and quality. Nevertheless, the need for a high temperature and the relatively long process time within each cycle hinder the commercial development in terms of production cost. In this work, we demonstrate a fast (<3 min) and feasible approach to synthesizing a few-layers of WSe2 and MoSe2 on arbitrary substrates by a microwave-assisted selenization process. The transition metal dichalcogenides (TMDs) can be patterned by standard photolithography. Furthermore, controllable layered growth from horizontal to vertical alignment can be achieved, leading to an enhanced chemical catalytic activity caused by large edge sites (exposed areas). As a proof, a highly sensitive NO gas sensor based on vertical WSe2 was fabricated. Moreover, our microwave assisted selenization process can be further extended to achieve other two-dimensional TMD materials because of the simplicity of the process.
URI: http://dx.doi.org/10.1021/acs.chemmater.5b04579
http://hdl.handle.net/11536/132586
ISSN: 0897-4756
DOI: 10.1021/acs.chemmater.5b04579
期刊: CHEMISTRY OF MATERIALS
Volume: 28
Issue: 4
起始頁: 1147
結束頁: 1154
顯示於類別:期刊論文