Application of Super-Fine Ink-Jet Printer to Fabrication of Terahertz Planer Metamaterials

Abstract

A super-fine ink-jet (SIJ) printing technology has been applied to the fabrication of terahertz metamaterials. The SIJ printing process is very simple and flexible, although the accuracy of the metallic line is comparable to the photolithography process. We fabricate basic terahertz metamaterials printed on high resistivity Si substrates: metal wire-grid structures and split-ring resonator arrays. The terahertz responses of the printed samples agree with those expected from the structures. The SIJ printing has a potential to accelerate the developments of the terahertz metamaterial researches.