Title: Fabrication of Optical Waveguide Devices Using Electromagnetic Assisted Nanoimprinting
Authors: Weng, Yung-Jin
Weng, Yung-Chun
Wong, Yong-Cheng
Yang, Sen-Yeu
Liu, Hsu-Kang
機械工程學系
Department of Mechanical Engineering
Keywords: optical waveguide;magnetic powder;magnetic-flexible mold;Electromagnetic control technology;Nanoimprinting technology
Issue Date: 2009
Abstract: A creative technology was used in this research. Using the PDMS flexible mold magnetic powder method to transmit imprinting, and by combining the special characteristics of the soft lithography, polymethylmethacrylate (PMMA), and electromagnetic Plate uniform control pressing technology, researching the use of magnetic flexible mold imprinting technology to produce the optical waveguide devices, so as to allow the usage and the technology of micro hot embossing or nanoimprinting more mature.
URI: http://dx.doi.org/10.1109/ICSPS.2009.179
http://hdl.handle.net/11536/135010
ISBN: 978-0-7695-3654-5
DOI: 10.1109/ICSPS.2009.179
Journal: PROCEEDINGS OF THE 2009 INTERNATIONAL CONFERENCE ON SIGNAL PROCESSING SYSTEMS
Begin Page: 910
End Page: +
Appears in Collections:Conferences Paper