标题: | Fabrication of Optical Waveguide Devices Using Electromagnetic Assisted Nanoimprinting |
作者: | Weng, Yung-Jin Weng, Yung-Chun Wong, Yong-Cheng Yang, Sen-Yeu Liu, Hsu-Kang 机械工程学系 Department of Mechanical Engineering |
关键字: | optical waveguide;magnetic powder;magnetic-flexible mold;Electromagnetic control technology;Nanoimprinting technology |
公开日期: | 2009 |
摘要: | A creative technology was used in this research. Using the PDMS flexible mold magnetic powder method to transmit imprinting, and by combining the special characteristics of the soft lithography, polymethylmethacrylate (PMMA), and electromagnetic Plate uniform control pressing technology, researching the use of magnetic flexible mold imprinting technology to produce the optical waveguide devices, so as to allow the usage and the technology of micro hot embossing or nanoimprinting more mature. |
URI: | http://dx.doi.org/10.1109/ICSPS.2009.179 http://hdl.handle.net/11536/135010 |
ISBN: | 978-0-7695-3654-5 |
DOI: | 10.1109/ICSPS.2009.179 |
期刊: | PROCEEDINGS OF THE 2009 INTERNATIONAL CONFERENCE ON SIGNAL PROCESSING SYSTEMS |
起始页: | 910 |
结束页: | + |
显示于类别: | Conferences Paper |