标题: Fabrication of Optical Waveguide Devices Using Electromagnetic Assisted Nanoimprinting
作者: Weng, Yung-Jin
Weng, Yung-Chun
Wong, Yong-Cheng
Yang, Sen-Yeu
Liu, Hsu-Kang
机械工程学系
Department of Mechanical Engineering
关键字: optical waveguide;magnetic powder;magnetic-flexible mold;Electromagnetic control technology;Nanoimprinting technology
公开日期: 2009
摘要: A creative technology was used in this research. Using the PDMS flexible mold magnetic powder method to transmit imprinting, and by combining the special characteristics of the soft lithography, polymethylmethacrylate (PMMA), and electromagnetic Plate uniform control pressing technology, researching the use of magnetic flexible mold imprinting technology to produce the optical waveguide devices, so as to allow the usage and the technology of micro hot embossing or nanoimprinting more mature.
URI: http://dx.doi.org/10.1109/ICSPS.2009.179
http://hdl.handle.net/11536/135010
ISBN: 978-0-7695-3654-5
DOI: 10.1109/ICSPS.2009.179
期刊: PROCEEDINGS OF THE 2009 INTERNATIONAL CONFERENCE ON SIGNAL PROCESSING SYSTEMS
起始页: 910
结束页: +
显示于类别:Conferences Paper