Insight of stress effect on the ONO stack layer in a SONOS-type flash memory cell

doi:10.1109/RELPHY.2006.251327

Title:	Insight of stress effect on the ONO stack layer in a SONOS-type flash memory cell
Authors:	Yeh, C. C. Liao, Y. Y. Wang, Tahui Tsai, W. J. Lu, T. C. Kao, H. L. Ou, T. F. Chen, M. S. Chen, Y. K. Lai, E. K. Shih, Y. H. Ting, WenChi Ku, Y. H. Joseph Lit, Chih-Yuan 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
Issue Date:	2006
Abstract:	The stress effect on the ONO stack layer in a two-bit SONOS-type memory cell is investigated. Our results show that P/E cycles induced stress will generate extra nitride, oxide, and interface traps in the ONO stack layer. Besides, these stress created traps are unstable and will be annealed by additional thermal treatment. Storage electrons escape from stress-created nitride and oxide traps and the trap annealing effects are root causes of charge loss in a SONOS cell.
URI:	http://dx.doi.org/10.1109/RELPHY.2006.251327 http://hdl.handle.net/11536/135207
ISBN:	0-7803-9498-4
ISSN:	1541-7026
DOI:	10.1109/RELPHY.2006.251327
Journal:	2006 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 44TH ANNUAL
Begin Page:	691
End Page:	+
Appears in Collections:	Conferences Paper