Study on Transparent Amorphous Indium Oxide Thin Film Transistors Technology

Title:	Study on Transparent Amorphous Indium Oxide Thin Film Transistors Technology
Authors:	Chang, Chih-Hsiang Lai, Yu-Chia Fan, Yang-Shun Chang, Che-Chia Liu, Po-Tsun 電子工程學系及電子研究所光電工程學系顯示科技研究所 Department of Electronics Engineering and Institute of Electronics Department of Photonics Institute of Display
Issue Date:	2015
Abstract:	In this study, we analyzed the In2O3 thin flints with different oxygen How rate during sputtering as the transistor\'s channel layer. The electrical analysis including device\'s reliability and material analysis were both examined.
URI:	http://hdl.handle.net/11536/136105
ISBN:	978-1-4799-9928-6
ISSN:	1946-1550
Journal:	PROCEEDINGS OF THE 22ND INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA 2015)
Begin Page:	374
End Page:	378
Appears in Collections:	Conferences Paper