Flexible Polymer/Multi-walled Carbon Nanotube Composite Sensor Array Equipped with Microheater for Gas Sensing

Abstract

A polymer/multi-walled carbon nanotube (MWCNT) composite sensor array based on a flexible polyimide substrate equipped with a thermostatic microheater to provide different working temperatures was developed for gas sensing. The thermostatic microheater provided nine working temperatures ranging from 20 degrees C to 60 degrees C. Each microheater element included a 3 x 3 polymer/MWCNT composite sensor array, which is composed of MWCNTs and polymer composite, as a sensing material. The device was developed to investigate the effect of device temperature on the response of polymer/MWCNT composite gas sensor arrays. The response to ethanol at different temperatures showed resistance variation but similar performance for the proposed gas sensor array.