標題: | Fabrication of (111) nanotwinned Cu and its applications in interconnects of microelectronic devices |
作者: | Chen, Chih Liu, Chien-Min Lu, Tien-Lin Lin, Han-wen Chu, Yi-Cheng Lu, Chia-Ling Juang, Jing-Ye Chen, Kuan-Neng Tu, K. N. 材料科學與工程學系 電子工程學系及電子研究所 Department of Materials Science and Engineering Department of Electronics Engineering and Institute of Electronics |
公開日期: | 2016 |
URI: | http://hdl.handle.net/11536/136457 |
ISBN: | 978-1-5090-0386-0 |
期刊: | 2016 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE / ADVANCED METALLIZATION CONFERENCE (IITC/AMC) |
起始頁: | 27 |
結束頁: | 27 |
顯示於類別: | 會議論文 |