標題: Fabrication of (111) nanotwinned Cu and its applications in interconnects of microelectronic devices
作者: Chen, Chih
Liu, Chien-Min
Lu, Tien-Lin
Lin, Han-wen
Chu, Yi-Cheng
Lu, Chia-Ling
Juang, Jing-Ye
Chen, Kuan-Neng
Tu, K. N.
材料科學與工程學系
電子工程學系及電子研究所
Department of Materials Science and Engineering
Department of Electronics Engineering and Institute of Electronics
公開日期: 2016
URI: http://hdl.handle.net/11536/136457
ISBN: 978-1-5090-0386-0
期刊: 2016 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE / ADVANCED METALLIZATION CONFERENCE (IITC/AMC)
起始頁: 27
結束頁: 27
顯示於類別:會議論文