八吋晶圓廠濕式清洗機台安全性再探討與改善

Abstract

濕式清洗機台因製程之需求，使用了大量的有機溶劑且伴隨使用加熱器進行加熱，同時也使用了很多的可燃性塑料製造材質，例如：聚丙烯(Polypropylene，簡稱PP)及聚氯乙烯(Polyvinyl Chloride，簡稱PVC)等。若加熱器發生異常，可能會造成嚴重的火災事故，並對人員安全及公司財產造成重大威脅和損失。 本研究參考相關設計規範及災害案例分析，制定濕式清洗機台的「加熱器檢核表」及「消防系統檢核表」，用以檢核濕式清洗機台內部的加熱器與消防系統的安全性能。完成安全性能評估後，濕式清洗機台的消防系統需再藉由本研究所制定之「消防系統驗收查核表」進行測試驗收，確保整個消防系統皆能符合設計規範及安全要求。針對濕式清洗機台所在環境的其他風險因子，提出職業安全衛生風險管理設施及措施。 本研究建議，濕式清洗機台於新購入時，應針對機台加熱器、消防系統及機台所在環境的其他風險因子進行檢核及驗收；於機台設置後，每半年應定期執行加熱器和消防系統檢核。此外，應持續搜集相關災害案例進行分析，針對災害發生的根本原因平行展開進行改善，並加強管理所在環境的其他風險因子，才能有效降低濕式清洗機台發生火災所造成之嚴重損失。

Due to the process requirements, the wet bench used a lot of flammable organic solvents and using heater for heating. In addition, it also used a lot of combustible plastic materials, such as Polypropylene (PP), Polyvinyl Chloride (PVC), and etc. If the heater was under abnormal conditions, it could easily lead to serious fire accidents, and caused significant loss of company property or casualties of life. Based on the relevant design specifications and historical case studies, this study has developed “Heater Checklist” and “Fire Protection System Checklist” to assess the safety performance of heater and fire protection system of wet bench. After completing the safety performance assessments, fire systems need to do further acceptance testing by using “Fire Protection System Acceptance Checklist”. This study also proposes control and prevention measures of other environmental risk factors of wet bench. This study suggest that, at the time of the new purchase of wet bench, the company should use the checklists developed by this study to check and do the acceptance testing of heater, fire protection system, and other environmental risk factors. Upon machine settings, the heater and fire protection system should have a regular check every six months. Furthermore, the company should continue collecting and analyzing related cases, and carry out in parallel improvement against the root causes of disasters. It is also needed to strengthen the management of other risk factors for the environment.