軟性碟形微帶天線陣列之研究

Abstract

論文主要分為三部分，第一部分為嘗試將軟性基板製程碟形，並研究如何與矽基板組裝，第二部分則以嘗試先以Kapton軟性基板彎曲的特性，製成太赫茲頻段的微帶天線陣列，並使其產生碟形，並探討碟行微帶天線與平面天線在特定點的接收功率做比較，第三部分為探討製程上所造成的量測問題，並針對製程上的問題用HFSS模擬軟體模擬並與量測數據做比較，最後推論並提出修補方法並針對原本設計結構作探討。

In the first part, we try to fabricate the flexible substrate and study how to assemble with the silicon substrate. In the second part, we try to make the patch antenna array at terahertz band on a Kapton flexible substrate . We produce disc-like antenna, and discuss the receiving power at a specific point between flat antenna and disc-like antenna. In the third part, we discuss the problem caused by fabrication of disc-like antenna, and simulate by HFSS software for process problems to compare with the experimental result, and finally deduce and propose repair methods and discuss the problem of the original design structure.