聚丙烯高分子纖維紡絲之製備與其作為過濾膜之應用

Abstract

半導體製造與應用一直是當前學術界與工業界的研究重點，目前已有許多製造半導體材料的方法；另外，為了符合摩爾定律每家半導體廠幾乎都在大量投入資金與設備。然而半導體製程中，有一道最基本的程序就是化學機械研磨製程(Chemical Mechanical Polishing，CMP)，又稱晶圓研磨，此製程應用在移除介電層氧化物與金屬薄膜，利用帶有研磨性和腐蝕性的研磨漿料來搭配拋光墊與支撐環來進行晶圓表面平坦化，並且在拋光過程中可以讓晶圓達到孔槽的平坦化、金屬接頭的平坦化以及氧化層與金屬層間的介面平坦化。 因化學研磨漿料中分佈著不同顆粒大小的研磨粒子，這些不同大小的粒子在研磨晶圓時，可能會造成晶圓的破裂，造成製程端的問題，所以需要利用濾芯將不需要的研磨顆粒進行篩選作業。本研究主要是對高分子纖維紡絲材料進行過濾效果測試，並探討其過濾效能與影響。本論文以一個實驗主題做討論。實驗主題是以市售商業過濾膜技術為基底，並且利用聚苯乙烯乳膠(Polystyrene Latex，PSL)當雜質原料，在材料上我們選擇在半導體業上有廣泛應用的聚丙烯高分子，因聚丙烯高分子材料具有耐酸鹼與售價便宜等條件，所以一直是半導體業界的愛好材料之一。 在此實驗主題中首先要先改變不同的生產參數，例如:轉速馬達、模具孔徑、噴絲距離等等，來探討這些生產參數對於聚丙烯高分子纖維形成的影響，將其纖維紡絲做收集後，再藉由濾效測試站來進行樣品實驗，最後再搭配不一樣的實驗條件，例如: pH值、不同生產條件的紡絲纖維組合、水溫等參數來探討是否會對實驗結果造成影響。

Semiconductor manufacturing and application is an important research area in both academic and industrial field nowadays, and there are many ways to manufacture semiconductor materials. Most companies that have semiconductor business invest amounts of capitals and equipments to meet the “Moore’s Law”. There is one basic process for the semiconductor field that we call “Chemical Mechanical Polishing, CMP”; another way to describe it is “Wafer Polishing”. This process is applied to the removal of the dielectric layer oxide and the metal film by using the grinding slurry with abrasive and corrosive properties. Moreover, with a polishing pad and a support ring to provide planarization of the wafer surface, the roughness of the surface can be decreased during the polishing process. The different sizes of particles in CMP slurry may cause wafer breaking or chip scratching in the process. Therefore, it is critical to use suitable filation membranes to control the particle sizes in CMP slurry. In my research, I focus on the effect and impact of fiber filtration materials. I design experiments based on the membrane filtration using commercial technology. Polypropylene (PP) fibers are prepared using the melt blown technique, and polystyrene latex is used as the impurity material. By changing different processing parameters such as the pump rate, nozzle size, and distance, PP fibers with different sizes and morphologies are prepared. Filtration membranes are constructed using different combinations of PP fibers. The filtration efficiencies are also measured under diffenent pH values and water temperatures.