| 標題: | 某晶圓廠IPA濕式清洗製程的 VOCs排放減量研究 The Study of Volatile Organic Solvents (VOCs) Emission Reduction of Semiconductor Manufacturing in IPA Wet Cleaning Process |
| 作者: | 黃成富 蔡春進 Huang,Cheng-Fu Tsai,Chuen-Jinn 工學院永續環境科技學程 |
| 關鍵字: | VOCs排放量;IPA(異丙醇);濕式清洗製程;火焰離子偵測器(FID);VOCs emissions;IPA (Isopropyl alcohol);Wet Cleaning Process;Flame Ionization Detectors |
| 公開日期: | 2017 |
| URI: | http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070061506 http://hdl.handle.net/11536/142709 |
| 顯示於類別： | 畢業論文 |
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