矽奈米電子元件於生醫與氣體感測研究

標題:	矽奈米電子元件於生醫與氣體感測研究 Study of Silicon Nano-electronic Devices as biosensor and gas sensor
作者:	林儒政許鉦宗潘扶民 Lin, Ru-Zheng Sheu, Jeng-Tzong Pan, Fu-Ming 材料科學與工程學系奈米科技碩博士班
關鍵字:	奈米線;環繞式閘極;無接面電晶體;反轉式電晶體;矽奈米帶;區域焦耳熱;電漿增進原子層沉積;電漿輔助化學氣相沈積;選擇性沉積;nanowire (NW);gate-all-around (GAA);transistor;junctionless (JL);inversion mode (IM);silicon nanobelt;localized Joule heating;plasma-enhanced atomic layer deposition;plasma-enhanced chemical vapor deposition;selective deposition
公開日期:	2018
URI:	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070081603 http://hdl.handle.net/11536/142965
Appears in Collections:	Thesis