電漿增益化學氣相沉積主機台反應產物危害分析-以某太陽能電池製造廠

Abstract

我國行政院勞工委員會依勞動檢查法第二十六條第二項規定於八十三年五月二日訂定危險性工作場所審查暨檢查辦法，事業單位依據危險性工作場所分類，必須於勞工作業前向檢機構申請審查及檢查。

事業單位評估過程中，先實施初步危害分析（Preliminary Hazard Analysis）以分析發掘工作場所重大潛在危害，並針對重大潛在危害實施下列之一之安全評估方法完成評估：  檢核表（Checklist）。  如果-結果分析（What If）。  危害及可操作性分析（Hazard and Operability Studies）。  故障樹分析（Fault Tree Analysis）。  失誤模式與影響分析（Failure Modes and Effects Analysis）。  其他經中央主管機關認可具有上列同等功能之安全評估方法。

以甲類危險性工作場所使用矽甲烷為例，雖然事業單位依法完成審查作業，但依然發生許多火災爆炸事故，顯見在評估過程中仍有需多之處需要各界共同努力改善評估方法，以事業單位發掘工作場所重大潛在危害，進而預防火災爆炸事故發生。

關鍵字：矽甲烷、PECVD、電漿增益化學氣相沉積

Council Of Labor Affairs established Hazardous Work Place Review and Inspection Rules according to Paragraph 2, Article 26 of Labor Inspection Law from May 2,1994, all enterprises must apply for safety review and inspection by labor inspection authorities in accordance with various Hazardous Work Place.

The first step of evaluation process is Preliminary Hazard Analysis. In that way, we can identify major potential hazards in the work place through analysis by using one of following safety evaluation methodologies.  Checklist  What If  Hazard and Operability Studies  Fault Tree Analysis  Failure Modes and Effects Analysis  others safety evaluation methodologies which have the same functions approved by Central committee Controll- ing organization

Although enterprise pass the safety review and inspection, for example : the using of SiH4 in Category A Hazardous work places, fire and explored accidents still happened. Obviously, it shows the evaluation process exist lot of space to improve in order to prevent fire and explored accidents happened again.