標題: Development and Fabrication of AlGaInP-Based Flip-Chip Micro-LEDs
作者: Horng, Ray-Hua
Chien, Huan-Yu
Chen, Ken-Yen
Tseng, Wei-Yu
Tsai, Yu-Ting
Tarntair, Fu-Gow
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: Flip-chip;light-emitting diodes;micro-LED
公開日期: 1-Jan-2018
摘要: The fabrication of AlGaInP-based flip-chip micro light-emitting-diodes (LED; emitting area: 4.5 mil x 5 mil) with horizontal electrodes is reported in this paper. The thickness of the epitaxial layer of the thin LED structure was reduced to 50% of that of the traditional thick LED, whereas carrier concentration in the n-type GaAs contact layer was increased to 5 x 10(18) cm(-3) to meet the Ohmic contact requirement. At a current injection of 5 mA, the thin LED exhibited a forward voltage, output power, and external quantum efficiency of 1.8 V, 1.9 mW, and 19%, respectively. The optoelectronic performance of the thin LED was as good as that of the traditional thick red LED. The technique proposed by this paper can be used to integrate AlGaInP-based LEDs with nitride LEDs for full-color display applications.
URI: http://dx.doi.org/10.1109/JEDS.2018.2823981
http://hdl.handle.net/11536/144902
ISSN: 2168-6734
DOI: 10.1109/JEDS.2018.2823981
期刊: IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY
Volume: 6
起始頁: 475
結束頁: 479
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