標題: Sensing and structural properties of Ti-doped tin oxide (SnO2) membrane for bio-sensor applications
作者: Isabel, A. Panimaya Selvi
Kao, Chyuan Haur
Mahanty, Rama Krushna
Wu, Yew Chung Sermon
Li, Chung Yi
Lin, Chan Yu
Lin, Chun Fu
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: Ti-doped;SnO2;Sensing membrane
公開日期: 1-Sep-2017
摘要: We investigated the effect of rapid thermal annealing (RTA) on the sensing and structural characteristics of Ti-doped SnO2 based electrolyte-insulator-semiconductor (EIS) pH sensors. The Ti-doped Tin oxide (SnO2) EIS sensor annealed at 700 degrees C post deposition annealing, exhibits the best sensing characteristics in terms of sensitivity, linearity, hysteresis and drift rate. This derives from Ti incorporation that improves the thin-film stoichiometry by reducing dangling bonds on the dielectric surface and improves the temperature stability. We further studied the structural, compositional, and morphological characteristics of the deposited thin-film. RTA treatment increases the sensitivity and linearity by creating larger grain size and higher number of surface sites. Sodium (Na+) and potassium (K+) sensing performance was also measured using the fabricated EIS sensors.
URI: http://dx.doi.org/10.1016/j.ceramint.2017.05.073
http://hdl.handle.net/11536/145843
ISSN: 0272-8842
DOI: 10.1016/j.ceramint.2017.05.073
期刊: CERAMICS INTERNATIONAL
Volume: 43
起始頁: 10386
結束頁: 10391
Appears in Collections:Articles