標題: | FABRICATION OF A TRANSPARENT STRUCTURED SUPEROMNIPHOBIC SURFACE USING A MULTIPLE PARTIAL EXPOSE METHOD |
作者: | Lee, Meng-Shiue Wu, Po-Han Hsu, Wensyang 機械工程學系 Department of Mechanical Engineering |
公開日期: | 1-一月-2017 |
摘要: | A novel approach which uses a multiple partial exposure method to fabricate a transparent structured superomniphobic surface with doubly re-entrant structures by using negative thick photoresist SU-8 as the material is proposed. By using gray-tone lithography, the doubly re-entrant structures can be formed only via a standard lithography process. The gray-tone lithography for fabricating the doubly re-entrant structures is achieved by depositing three appropriate thicknesses of Ti film on glass substrate that acts as the gray-tone mask. The proposed transparent surface with the doubly re-entrant structures successful suspend all the tested liquid even the completely wetting liquid, such as silicon oil with the surface tension of 20.9 mN/m. This approach provides a simple, flexible and low-cost solution for fabricating superomniphobic surface, and it also has the potential to integrate with either flexible or nonflexible substrate for different applications. |
URI: | http://hdl.handle.net/11536/146591 |
ISSN: | 1084-6999 |
期刊: | 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017) |
起始頁: | 1314 |
結束頁: | 1317 |
顯示於類別: | 會議論文 |