Flip-Up Micro Scanning Mirror with Vertical Comb Drive Assembled by Simple Push Operations

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	Chen, Cheng-An	en_US
dc.contributor.author	Chiu, Yi	en_US
dc.date.accessioned	2014-12-08T15:20:53Z	-
dc.date.available	2014-12-08T15:20:53Z	-
dc.date.issued	2011	en_US
dc.identifier.isbn	978-1-4577-0336-2	en_US
dc.identifier.uri	http://hdl.handle.net/11536/14870	-
dc.description.abstract	A novel flip-up micro scanning mirror is fabricated in SOI substrates with SU8 vertical comb drive actuators. The device is assembled by simple push operation. The design and fabrication of the device is presented.	en_US
dc.language.iso	en_US	en_US
dc.subject	scanning mirror	en_US
dc.subject	vertical comb drive	en_US
dc.subject	flip-up	en_US
dc.subject	assembly	en_US
dc.title	Flip-Up Micro Scanning Mirror with Vertical Comb Drive Assembled by Simple Push Operations	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.journal	OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS	en_US
dc.citation.spage	189	en_US
dc.citation.epage	190	en_US
dc.contributor.department	電機工程學系	zh_TW
dc.contributor.department	Department of Electrical and Computer Engineering	en_US
dc.identifier.wosnumber	WOS:000297850100080	-
顯示於類別：	會議論文