標題: Improvement of light extraction for AlGaN-based near UV LEDs with flip-chip bonding fabricated on grooved sapphire substrate using laser ablation
作者: Ku, Chun-Han
Wang, Wei-Kai
Horng, Ray-Hua
交大名義發表
電子工程學系及電子研究所
National Chiao Tung University
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-Jun-2019
摘要: Mesh-textured flip-chip (FC) structures of AlGaN-based near ultraviolet-light-emitting diodes (NUV-LEDs) are fabricated using an Nd:YAG laser scriber. Compared with the output power of the reference FC-LEDs, those of conventional sapphire substrate (CSS) FC-LEDs and the patterned sapphire substrate FC-LEDs with laser-scribed mesh-textured backsides were improved by 28.7% and 7.2%, respectively. The CSS FC-LED is enhanced using the mesh-textured trench pattern attributable to an increase in the light-extraction efficiency resulting from an increase in the photon-escape probability due to enhanced light scattering at the trench-patterned-sapphire/air interface. Furthermore, the current-voltage curves depict that the laser scribing process does not adversely affect the electrical properties of the FC-LEDs. A Trace-Pro simulation revealed that the laser-scribed-trench CSS FC-LED is effective for light extraction.
URI: http://dx.doi.org/10.1016/j.mssp.2019.02.011
http://hdl.handle.net/11536/148940
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2019.02.011
期刊: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume: 95
起始頁: 48
結束頁: 53
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