標題: | X-ray photoelectron spectroscopy energy band alignment of spin-on CoTiO3 high-k dielectric prepared by sol-gel spin coating method |
作者: | Kao, Kuo-Hsing Chuang, Shiow-Huey Wu, Woei-Cherng Chao, Tien-Sheng Chen, Jian-Hao Ma, Ming-Wen Gao, Reui-Hong Chiang, Michael Y. 電子物理學系 電子工程學系及電子研究所 Department of Electrophysics Department of Electronics Engineering and Institute of Electronics |
公開日期: | 1-Sep-2008 |
摘要: | The characteristics of CoTiO3 high-k dielectric prepared by sol-gel spin coating method had been demonstrated. High electrical permittivity (k similar to 40.2) of CoTiO3 dielectric was extracted via the transmission electron microscopy image and capacitance-voltage curves. In addition, the valence band offset between thermal SiO2 and spin-on CoTiO3 was about 4.0 eV, which was detected by x-ray photoelectron spectroscopy. The band gaps of thermal SiO2 and spin-on CoTiO3 were 9.0 and 2.2 eV, respectively. Energy band alignment of spin-on CoTiO3 directly with SiO2 and indirectly with Si was determined in this work. (c) 2008 American Institute of Physics. |
URI: | http://dx.doi.org/10.1063/1.2978231 http://hdl.handle.net/11536/149501 |
ISSN: | 0003-6951 |
DOI: | 10.1063/1.2978231 |
期刊: | APPLIED PHYSICS LETTERS |
Volume: | 93 |
Appears in Collections: | Articles |