標題: The TEOS CVD oxide deposited on phosphorus in situ doped polysilicon with rapid thermal annealing
作者: Kao, CH
Lai, CS
Lee, CL
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-Nov-1997
摘要: A TEOS oxide deposited on the phosphorus in situ doped polysilicon annealed with RTA is shown to have good electrical characteristics such as a high breakdown field (>12 MV/cm), especially for the positive bias, and a large Qbd (26 Coul/cm(2)). The improvement is believed to be due to the relatively smooth surface of the in situ doped polysilicon and the reduction of the trapping density by RTA.
URI: http://hdl.handle.net/11536/149674
ISSN: 0741-3106
期刊: IEEE ELECTRON DEVICE LETTERS
Volume: 18
起始頁: 526
結束頁: 528
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