標題: Electrodeless dielectrophoretic concentrator for analyte pre-concentration on poly-silicon nanowire field effect transistor
作者: Puttaswamy, Srinivasu Valagerahally
Lin, Chih-Heng
Sivashankar, Shilpa
Yang, Yuh-Shyong
Liu, Cheng-Hsien
生物科技學院
College of Biological Science and Technology
關鍵字: FET biosensors;iDEP;Sensitivity;Maskless photolithography
公開日期: 1-Mar-2013
摘要: The sensitivity of biosensors can be affected by mass transport limitations as a result of miniaturization. To enhance signal sensitivity, pre-concentration of deoxyribonucleic acid (DNA), in the vicinity of the sensing elements of n-type polycrystalline silicon nanowire field effect transistor (Poly-Si NWFET) is demonstrated using a microfluidic device based on insulator or gradient dielectrophoresis (iDEP) to overcome mass transport limitations. In insulator-based dielectrophoresis (iDEP), insulating microstructures produce non-uniform electric fields to drive dielectrophoresis (DEP) in microsystems. Fabrication of accurately controlled three-dimensional (3D) microstructure of poly (ethylene glycol) diacrylate (PEG-DA) with a narrow microchannel using maskless gray-scale lithography is described. The fabrication of three-dimensional structures at low cost with saving time is accomplished by the use of maskless exposure system. PEG-DA has been used due to its excellent biocompatibility and ease of fabrication. To enhance the stability of PEG-DA, we added another polymer pentaerythritol tetraacrylate (PETA). Electrical property of the Poly-Si NWFET is ensured by plotting I-V-G curve after the integration of iDEP micro device. (c) 2013 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.snb.2013.01.016
http://hdl.handle.net/11536/150491
ISSN: 0925-4005
DOI: 10.1016/j.snb.2013.01.016
期刊: SENSORS AND ACTUATORS B-CHEMICAL
Volume: 178
起始頁: 547
結束頁: 554
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