標題: | InGaN/GaN MQW Nanorods LED Fabricated by ICP-RIE and PEC Oxidation Processes |
作者: | Lai, Fang-, I Huang, H. W. Chiu, Ching-Hua Lai, C. F. Lu, T. C. Ku, H. C. Wang, S. C. 光電工程學系 Department of Photonics |
公開日期: | 1-Jan-2007 |
摘要: | The InGaN/GaN nanorods LED was successfully fabricated by ICP-RIE and PEC processes. Compared with as-grown sample, the PL and EL peak-wavelengths of the nanorods with PEC show 8.6 and 10.5 nm blue-shift, respectively. (c) 2007 Optical Society of America |
URI: | http://hdl.handle.net/11536/151172 |
期刊: | 2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5 |
起始頁: | 175 |
Appears in Collections: | Conferences Paper |