FABRICATION METHOD FOR TWO-DIMENSIONAL MATERIALS

Title:	FABRICATION METHOD FOR TWO-DIMENSIONAL MATERIALS
Authors:	Tuo-Hung HOU Jyun-Hong Huang
Issue Date:	11-Oct-2018
Abstract:	A fabrication method for two-dimensional materials of the present invention includes the following steps: forming a thin film having at least one two-dimensional element on a substrate; forming at least one capping layer on the thin film; annealing the thin film to form a two-dimensional material film after the capping layer is formed.
Gov't Doc #:	C23C016/50 C23C016/56 C23C016/52 C23C016/448 C23C014/34 C23C014/24 C23C014/06 C23C014/58
URI:	http://hdl.handle.net/11536/151441
Patent Country:	USA
Patent Number:	20180291508
Appears in Collections:	Patents

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