標題: | Secondary ion mass spectrometry to verify the implantation of magnetic ions in nanodiamonds |
作者: | Lin, Bo-Rong Wang, Chiung-Chi Chen, Chien-Hsu Kunuku, Srinivasu Hsiao, Tung-Yuan Yu, Hung-Kai Chen, Tzung-Yuang Chang, Yu-Jen Liao, Li-Chuan Chang, Chun-Hsiang Chen, Fang-Hsin Niu, Huan Lee, Chien-Ping 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 7-十一月-2019 |
摘要: | Ion implantation is used to create nanodiamonds (NDs) with embedded magnetic ions for use in a wide range of biological and medical applications; however, the effectiveness of this process depends heavily on separating magnetic NDs from nonmagnetic ones. In this study, we use secondary ion mass spectrometry to verify the implantation of magnetic ions in NDs and the success of separation. When applied to a series of NDs with embedded iron or manganese ions, the sorting tool used in this study proved highly effective in selecting magnetic NDs. Besides, multienergy ion implantation and precise thickness control of NDs coating on the silicon wafer were suggested to improve this technology. Published under license by AIP Publishing. |
URI: | http://dx.doi.org/10.1063/1.5117342 http://hdl.handle.net/11536/153632 |
ISSN: | 0021-8979 |
DOI: | 10.1063/1.5117342 |
期刊: | JOURNAL OF APPLIED PHYSICS |
Volume: | 126 |
Issue: | 17 |
起始頁: | 0 |
結束頁: | 0 |
顯示於類別: | 期刊論文 |