標題: Secondary ion mass spectrometry to verify the implantation of magnetic ions in nanodiamonds
作者: Lin, Bo-Rong
Wang, Chiung-Chi
Chen, Chien-Hsu
Kunuku, Srinivasu
Hsiao, Tung-Yuan
Yu, Hung-Kai
Chen, Tzung-Yuang
Chang, Yu-Jen
Liao, Li-Chuan
Chang, Chun-Hsiang
Chen, Fang-Hsin
Niu, Huan
Lee, Chien-Ping
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 7-十一月-2019
摘要: Ion implantation is used to create nanodiamonds (NDs) with embedded magnetic ions for use in a wide range of biological and medical applications; however, the effectiveness of this process depends heavily on separating magnetic NDs from nonmagnetic ones. In this study, we use secondary ion mass spectrometry to verify the implantation of magnetic ions in NDs and the success of separation. When applied to a series of NDs with embedded iron or manganese ions, the sorting tool used in this study proved highly effective in selecting magnetic NDs. Besides, multienergy ion implantation and precise thickness control of NDs coating on the silicon wafer were suggested to improve this technology. Published under license by AIP Publishing.
URI: http://dx.doi.org/10.1063/1.5117342
http://hdl.handle.net/11536/153632
ISSN: 0021-8979
DOI: 10.1063/1.5117342
期刊: JOURNAL OF APPLIED PHYSICS
Volume: 126
Issue: 17
起始頁: 0
結束頁: 0
顯示於類別:期刊論文