標題: Study of E-Mode AlGaN/GaN MIS-HEMT with La-silicate Gate Insulator for Power Applications
作者: Huang, Kuan Ning
Lin, Yueh-Chin
Lin, Jia-Ching
Hsu, Chia Chieh
Lee, Jin Hwa
Wu, Chia-Hsun
Yao, Jing Neng
Hsu, Heng-Tung
Nagarajan, Venkatesan
Kakushima, Kuniyuki
Tsutsui, Kazuo
Iwai, Hiroshi
Chien, Chao Hsin
Chang, Edward Yi
材料科學與工程學系
照明與能源光電研究所
電子工程學系及電子研究所
國際半導體學院
Department of Materials Science and Engineering
Institute of Lighting and Energy Photonics
Department of Electronics Engineering and Institute of Electronics
International College of Semiconductor Technology
關鍵字: AlGaN;GaN MIS-HEMT;E-mode;La2O3;SiO2;La-silicate;MOSCAPs
公開日期: 1-Feb-2020
摘要: An enhancement-mode (E-mode) AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistor (MIS-HEMT) with La2O3/SiO2 gate insulator is investigated for high power application. The La2O3/SiO2 composite oxide formed amorphous La-silicate after post deposition annealing. Good oxide film quality and excellent La-silicate/AlGaN interface properties were achieved as evidenced by the capacitance-voltage (C-V) curves and hysteresis effect of the La-silicate on AlGaN/GaN metal-oxide-semiconductor capacitors. As a result, the E-mode AlGaN/GaN MIS-HEMT with La-silicate gate insulator shows good threshold voltage (V-th) stability and demonstrated only slightly increase in the dynamic on-resistance (R-on) after high drain bias stress test. The device also exhibits high current density of 752 mA/mm, high maximum transconductance of 210 mS/mm, low subthreshold swing of 104 mV/decade, and I-ON/I-OFF = 10(7) when tested at V-DS = 10 V. Furthermore, low on-resistance of 7.6 omega mm, high breakdown voltage of 670 V, and excellent delay time of 4.2 ps were achieved, demonstrating the La-silicate MIS-HEMTs have the potential to be used for power electronic applications.
URI: http://dx.doi.org/10.1007/s11664-019-07790-7
http://hdl.handle.net/11536/153965
ISSN: 0361-5235
DOI: 10.1007/s11664-019-07790-7
期刊: JOURNAL OF ELECTRONIC MATERIALS
Volume: 49
Issue: 2
起始頁: 1348
結束頁: 1353
Appears in Collections:Articles