Title: Tensile Properties and Thermal Stability of Unidirectionally < 111 >-Oriented Nanotwinned and < 110 >-Oriented Microtwinned Copper
Authors: Li, Yu-Jin
Tu, King-Ning
Chen, Chih
材料科學與工程學系
國際半導體學院
Department of Materials Science and Engineering
International College of Semiconductor Technology
Keywords: nano-twinned Cu;toughness;thermal stability;electroplated Cu
Issue Date: 1-Mar-2020
Abstract: Tensile tests on two kinds of electroplated copper foils with twins before and after annealing were performed. One electroplating parameter results in a microstructure of <110>-oriented microtwinned Cu (mt-Cu), and the other is <111>-oriented nanotwinned Cu (nt-Cu). The latter shows higher thermal stability than the former after annealing. Though the toughness for the two as-plated foils are quite close, the toughness for the <111> oriented nt-Cu increased from 34 to 74 MJ/m(3) after annealing at 250 degrees C for 3 h. In comparison, the toughness of the <110>-oriented mt-Cu remained almost the same after annealing.
URI: http://dx.doi.org/10.3390/ma13051211
http://hdl.handle.net/11536/154085
DOI: 10.3390/ma13051211
Journal: MATERIALS
Volume: 13
Issue: 5
Begin Page: 0
End Page: 0
Appears in Collections:Articles