標題: | Enhancement of Mechanical Bending Stress Endurance Using an Organic Trench Structure in Foldable Polycrystalline Silicon TFTs |
作者: | Zheng, Yu-Zhe Huang, Shin-Ping Chen, Po-Hsun Chang, Ting-Chang Tsai, Tsung-Ming Chu, Ann-Kuo Hung, Yang-Hao Shih, Yu-Shan Wang, Yu-Xuan Wu, Chia-Chuan Tu, Yu-Fa Chen, Yu-An Sun, Pei-Jun Chung, Yu-Hua Chen, Wei-Han Wang, Tai-Jui 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
關鍵字: | Stress;Thin film transistors;Logic gates;Buffer layers;Silicon;Insulators;Degradation;Foldable electronics;LTPS TFTs;organic trench;mechanical bending stress |
公開日期: | 1-May-2020 |
摘要: | This letter proposes a new organic trench structure which can enhance the endurance of polycrystalline silicon thin film transistors (TFTs) under mechanical bending stress. It compares conventional structure TFTs to devices with an organic trench to examine reliability after undergoing 100,000 iterations of channel width-axis (100,000'WC) compression at R = 2mm. Due to the low Young's modulus of organic materials, stress while undergoing bending strain is desorbed to the buffer layer, which can lower the overall stress in TFTs. Furthermore, an optimal location and ideal length for such an organic trench is evaluated by mechanical bending simulation. |
URI: | http://dx.doi.org/10.1109/LED.2020.2980123 http://hdl.handle.net/11536/154313 |
ISSN: | 0741-3106 |
DOI: | 10.1109/LED.2020.2980123 |
期刊: | IEEE ELECTRON DEVICE LETTERS |
Volume: | 41 |
Issue: | 5 |
起始頁: | 721 |
結束頁: | 724 |
Appears in Collections: | Articles |