標題: Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H2S Sensor at Room Temperature
作者: Chang, Po-Yi
Lin, Ching-Fu
Rouphael, Samer El Khoury
Huang, Ting-Hsuan
Wu, Chang-Mao
Berling, Dominique
Yeh, Ping-Hung
Lu, Chia-Jung
Meng, Hsin-Fei
Zan, Hsiao-Wen
Soppera, Olivier
物理研究所
光電工程學系
光電工程研究所
Institute of Physics
Department of Photonics
Institute of EO Enginerring
關鍵字: gas sensor;IZO;sol-gel;laser annealing;NIR;flexible
公開日期: 3-Jun-2020
摘要: A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200-300 degrees C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate.
URI: http://dx.doi.org/10.1021/acsami.0c03257
http://hdl.handle.net/11536/154514
ISSN: 1944-8244
DOI: 10.1021/acsami.0c03257
期刊: ACS APPLIED MATERIALS & INTERFACES
Volume: 12
Issue: 22
起始頁: 24984
結束頁: 24991
Appears in Collections:Articles