標題: Scanning Moire Fringe Method: A Superior Approach to Perceive Defects, Interfaces, and Distortion in 2D Materials
作者: Lin, Yung-Chang
Ji, Hyun Goo
Chang, Li-Jen
Chang, Yao-Pang
Liu, Zheng
Lee, Gun-Do
Chiu, Po-Wen
Ago, Hiroki
Suenaga, Kazu
電信工程研究所
Institute of Communications Engineering
關鍵字: STEM;scan moire fringe;transition-metal dichalcogenides;strain field;dislocations
公開日期: 26-五月-2020
摘要: Scanning moire fringe (SMF) is a widely utilized technique for the precise measurement of the strain field in semiconductor transistors and heterointerfaces. With the growing challenges of traditional chip scaling, two-dimensional (2D) materials turn out to be ideal candidates for incorporation into semiconductor devices. Therefore, a method to efficiently locate defects and grain boundaries in 2D materials is highly essential. Here, we present a demonstration of using the SMF method to locate the domain boundaries at the nearly coherent interfaces with sub-angstrom spatial resolution under submicron fields of views. The strain field of small angle grain boundary and lateral heterojunction are instantaneously found and precisely determined by a quick SMF method without any atomic resolution images.
URI: http://dx.doi.org/10.1021/acsnano.0c01729
http://hdl.handle.net/11536/154636
ISSN: 1936-0851
DOI: 10.1021/acsnano.0c01729
期刊: ACS NANO
Volume: 14
Issue: 5
起始頁: 6034
結束頁: 6042
顯示於類別:期刊論文